Klages, C.-P.C.-P.KlagesSchäfer, L.L.Schäfer2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/192652The following topics were dealt with: diamond, thin films, hot-filament deposition, source gas composition effects, filament materials, bias assistance, forced convection application, textured growth, heteroepitacial growth, process scale-up, applications.en667book article