Ultrafast laser processing - new possibilities for photonic device production

Nolte, S.S.NolteWill, M.M.WillBurghoff, J.J.BurghoffTünnermann, A.A.Tünnermann2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/346620en620Ultrafast laser processing - new possibilities for photonic device productionconference paper