Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronics

Steiniger, D.D.SteinigerBertz, A.A.BertzGessner, T.T.Gessner2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338773en621Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronicsconference paper