Beier, M.M.BeierStumpf, D.D.StumpfZeitner, U.D.U.D.ZeitnerGebhardt, A.A.GebhardtHartung, J.J.HartungRisse, S.S.RisseEberhardt, R.R.EberhardtGross, H.H.GrossTünnermann, A.A.Tünnermann2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/39902110.1364/FREEFORM.2015.FT3B.2A novel interferometric metrology using a multi-zone computer generated hologram for determining position and figure deviations of two anamorphic aspherical mirrors arranged on a common substrate is presented.en620conference paper