Self-aligned metalization and reactive ion effected buried base contact solar cells

Schaefer, SebastianSebastianSchaeferLüdemann, RalfRalfLüdemannGlunz, Stefan W.Stefan W.Glunz2022-03-032022-03-031999https://publica.fraunhofer.de/handle/publica/19592910.1002/(SICI)1099-159X(199909/10)7:5<387::AID-PIP276>3.0.CO;2-3en621697Self-aligned metalization and reactive ion effected buried base contact solar cellsjournal article