König, K.K.KönigSchuck, H.H.SchuckSauer, D.D.SauerBauerfeld, F.F.BauerfeldStracke, F.F.StrackeVelten, T.T.VeltenTchernook, A.A.TchernookMartin, S.S.MartinHarzic, Ronan LeRonan LeHarzic2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35296910.1117/12.691966en610620Femtosecond laser nanoprocessing using near-infrared nanojoule pulses at MHz repetition frequencyconference paper