Mohaupt, M.M.MohauptHarnisch, G.G.HarnischHeidler, N.N.HeidlerBeckert, E.E.BeckertZerfas, P.P.ZerfasEberhardt, R.R.EberhardtTünnermann, A.A.TünnermannDöring, H.-J.H.-J.DöringHeine, D.D.HeineKlein, M.M.Klein2022-03-122022-03-122012https://publica.fraunhofer.de/handle/publica/389661The paper describes the mechanical design of a motorized x-y-positioning system for beam shaping elements in an electron beam lithography tool considering the special environmental requirements of the electron optical column. The results of characterization activities are discussed. A vacuum chamber developed for tests of differential pumping under conditions down to 10-5 Pa is described. The performance of the applied position measuring systems and the test setup in the vacuum chamber is characterized. Results of different performance tests of the positioning system are illustrated. Finally, challenges are discussed which are closely connected to the requirement of long term system stability.en620conference paper