Tang, Z.Z.TangGross, H.H.Gross2022-03-152022-03-152021https://publica.fraunhofer.de/handle/publica/41330210.1117/12.2596127Compared to the rotationally symmetric systems, the surface-decomposed aberrations of the symmetry-free system is harder for analysis, due to the invalidity of the conventional paraxial reference. To solve this problem, a novel higher-order aberration calculation method for symmetry-free systems is proposed based on the mixed ray-tracing method, which is proved as a good approximation of the full-order transverse aberration for generalized systems. Furthermore, the method is also applicable for intrinsic/induced aberration calculation, as well as the surface additive Zernike coefficient fitting. With various potential implementations, the method is considered a convenient and powerful tool for aberration analysis of off-axis systems.enfull-order transverse aberrationintrinsic / induced aberrationsurface contributionZernike coefficient620conference paper