Jung, ManuelManuelJungBrunner, TobiasTobiasBrunnerWillenborg, EdgarEdgarWillenborgVedder, ChristianChristianVedder2025-04-072025-04-072025-03-27https://publica.fraunhofer.de/handle/publica/48627110.1364/OE.551580Previous studies have shown that laser polishing of glass is possible for flat surfaces. However, when it comes to three-dimensional geometries such as lenses, additional challenges arise. In this paper, we present a mathematical-physical model that calculates local setpoint values for the process parameters laser power and scanning speed based on the surface topography. By using this model, we can achieve a homogeneous polishing result for angles of incidence β ≤ 60֯. In comparison, if the process parameters are not adjusted, the surface roughness will start to increase when the laser beam is no longer orthogonal to the surface.enLaser ablationLaser beamsLaser glassOptical componentsOptical constantsSurface layersjournal article