Plasma etching and coating techniques to achieve antireflection properties in combination with additional surface functions on plastic optics

Schulz, U.U.SchulzWendling, I.I.WendlingMunzert, P.P.MunzertKaiser, N.N.Kaiser2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/359454en620Plasma etching and coating techniques to achieve antireflection properties in combination with additional surface functions on plastic opticsconference paper