Walter, H.H.WalterFaust, W.W.FaustSchubert, A.A.SchubertGrellmann, W.W.GrellmannMichel, B.B.Michel2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/328600en621Mechanical characterization of polymers in microelectronicsconference paper