Hariadi, I.I.HariadiTrieu, H.-K.H.-K.TrieuMokwa, W.W.MokwaVogt, H.H.Vogt2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/341690In this paper, the basic idea and the results of implementing thermal flow sensor with novel mesa structure are presented. One of the profound effects of the mesa structures on the characteristics of the flow sensor when it operates in TTOF mode is pointed out.enflow sensorthermal time-of-flightmesa structurephysical sensor621conference paper