Gorbunov, A.A.A.A.GorbunovPimenov, S.M.S.M.PimenovSmolin, A.A.A.A.SmolinDrescher, D.D.DrescherScheibe, H.J.H.J.Scheibe2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/323171Methodological problems of the applicability of scanning tunneling microscopy (STM) for the characterization of poorly conductive diamond and diamond-like carbon films are discussed. The sensitivity of STM to variation of the surface relief is characterized by a decay length d. It is shown that d depends on the serial resistance R of the sample seen by a tunneling microscope. For R<10 M Omega d is less than 1 nm that enables to image the samples with reasonable quality and correct reproduction of surface corrugations.dediamantähnlicher KohlenstoffDiamantschichtdiamond filmdiamond filmsdiamond-like carbonRaste-TunnelmikroskopieRastertunnelmikroskopieRauhigkeitroughnessscanning tunneling microscopy667621671conference paper