Rodrigues, G.G.RodriguesBastaits, R.R.BastaitsRoose, S.S.RooseStockman, Y.Y.StockmanGebhardt, S.S.GebhardtSchoenecker, A.A.SchoeneckerVillon, P.P.VillonPreumont, A.A.Preumont2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/36150010.1117/12.7878102-s2.0-66949148330This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom, by assembling segmented silicon mirrors with bimorph piezoelectric actuation. The production process relies on silicon wafers and thick film PZT deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly (linearly or less) with the number of degrees of freedom in the adaptive optics.en620conference paper