Schröder, S.S.SchröderHerffurth, T.T.HerffurthBlaschke, H.H.BlaschkeDuparré, A.A.Duparré2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/37085910.1364/OIC.2010.ThD2Light scattering measurement and analysis based on a simplified scatter model for multilayer coatings is used to investigate structural and alteration effects of HR coatings for 193 nm as well as Rugate filters for 355 nm.enconference paper