Bär, E.2022-03-022022-03-022016978-1-5090-0818-6978-1-5090-0816-2978-1-5090-0819-3978-1-5090-0817-9https://publica.fraunhofer.de/handle/publica/159941International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2016