Veith, M.M.VeithBender, M.M.BenderLehnert, T.T.LehnertZimmer, M.M.ZimmerJakob, A.A.Jakob2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22524610.1039/c0dt00830c2-s2.0-78751548727Lead titanate, lead zirconate, and lead zirconate titanate (PZT) films in the sub-m-range were produced at temperatures around 400 °C using novel single-source precursors in a classical thermal CVD process. The design of two bimetallic alkoxide compounds, a lead titanate and a lead zirconate source with almost identical physical properties and complement miscibility, resulted in a new quasi-single-source PZT precursor, an azeotropic mixture that evaporates at 30 °C and at a pressure of 4 × 10-1 mbar. After thermal treatment at 650 °C, transparent (100)-oriented PZT films with remnant polarization of 20 C cm-2 and a coercive field strength of 20 V m-1 were achieved. An additional lead source is not required.en610540546journal article