Qu, W.W.QuMeyer, J.-U.J.-U.Meyer2022-03-082022-03-081998https://publica.fraunhofer.de/handle/publica/303876The invention relates to an electrode arrangement for the signal detection of gas-sensitive layers, comprising a first bottom electrode having an interdigital structure and a second upper electrode having an interdigital structure and the intermediate gas-sensitive layers acting as a humidity or gas sensor, whereby the electrode terminals a, a' and b, b' are positioned above each other and the interdigital structure or finger is arranged in such as way that the finger structures above each other have a reversed (+, -) voltage polarity.de608610620patent1994-4433102