Under CopyrightSchmitt, H.H.SchmittDuempelmann, P.P.DuempelmannFader, R.R.FaderRommel, MathiasMathiasRommelBauer, A.J.A.J.BauerFrey, L.L.FreyBrehm, M.M.BrehmKraft, A.A.Kraft2022-03-114.9.20122011https://publica.fraunhofer.de/handle/publica/37476010.24406/publica-fhg-374760ensubstrate conformal imprint lithographySCILUV-SCILPDMS stamplife time670620530Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithographyposter