Kurth, SteffenSteffenKurthFaust, W.W.FaustSpecht, H.H.SpechtMeinig, MarcoMarcoMeinigFernholz, G.G.Fernholz2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/220786en621Exploring microsystems - measurement and test in fabrication and R&Djournal article