Thermal oxidation for crystalline silicon solar cells exceeding 19% efficiency applying industrially feasible process technology

Schultz, OliverOliverSchultzMette, A.A.MetteHermle, MartinMartinHermleGlunz, Stefan W.Stefan W.Glunz2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21565310.1002/pip.814en621Thermal oxidation for crystalline silicon solar cells exceeding 19% efficiency applying industrially feasible process technologyjournal article