Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Sims

Willich, P.P.WillichBethke, R.R.Bethke2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/331111en667Quantitative depth profiling of Ti-N-C-O coating materials using MCs+-Simsconference paper