IEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. Vol.1

Ayazi, F.2022-03-022022-03-022014978-1-4799-3510-9978-1-4799-3508-6978-1-4799-3509-3https://publica.fraunhofer.de/handle/publica/156971IEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. Vol.1