Wagner, J.J.WagnerSchmitz, J.J.SchmitzFuchs, F.F.FuchsWeimar, U.U.WeimarHerres, N.N.HerresTränkle, G.G.TränkleKoidl, P.P.Koidl2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326936We report on the structural characterization of InAs/(GaIn)Sb superlattices (SL) grown by solid-source molecular-beam epitaxy. SL periodicity and overall structural quality were assessed by high-resolution X-ray diffraction and Raman spectroscopy. Spectroscopic ellipsometry was found to be sensitive to the (GaIn)Sb alloy composition.enEllipsometrieellipsometryIR detectionIR-DetektionRöntgenbeugungx-ray diffraction621667conference paper