Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"

Mannino, G.G.ManninoFeudel, T.T.FeudelPichler, P.P.PichlerServidori, M.M.Servidori2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/34585310.1016/S0921-5107(04)00567-7The text is a preface to a special issue of Materials Science and Engineering B containing selected papers presented at symposium B "Material science issues in advanced CMOS source-drain engineering" of the E-MRS Spring Meeting held in Stra sbourg from May 24 to 28, 2004.enCMOSsilicon670620530Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"Vorwort zu der Sonderausgabe über das EMRS 2004 Sympsium B zu "Materialwissenschaftliche Fragestellungen zu fortschrittlichen Technologien von Source/Drain-Gebieten in CMOS Transistoren"conference paper