Zürbig, V.V.ZürbigHees, J.J.HeesPletschen, WilfriedWilfriedPletschenSah, R.E.R.E.SahWolfer, M.M.WolferKirste, LutzLutzKirsteHeidrich, N.N.HeidrichNebel, C.C.NebelAmbacher, OliverOliverAmbacherLebedev, VadimVadimLebedev2022-03-042022-03-042014https://publica.fraunhofer.de/handle/publica/23599310.1016/j.tsf.2014.03.015Nanocrystalline diamond- (NCD) and AlN-based ultrathin single layer and bilayer membranes are investigated towards their mechanical properties. It is shown that chemo-mechanical polishing and heavy boron doping of NCD thin films do not impact the elastic properties of NCD layers as revealed by negligible variations of the NCD Young's modulus (E). In addition, it is demonstrated that the combination of NCD elastic layer and AlN piezo-actuator is highly suitable for the fabrication of mechanically stable ultrathin membranes in comparison to AlN single layer membranes. The elastic parameters of NCD/AlN heterostructures are mainly determined by the outstanding high Young's modulus of NCD (E = 1019 ± 19 GPa). Such ultrathin unimorph membranes allow for fabrication of piezo-actuated AlN/NCD microlenses with tunable focus length.enaluminium nitridenanocrystalline diamondpolishingmechanical propertiesp-type dopingMembranes541journal article