Geerlings, E.E.GeerlingsRattunde, M.M.RattundeSchmitz, J.J.SchmitzKaufel, G.G.KaufelWagner, J.J.WagnerBläsi, B.B.BläsiKallweit, D.D.KallweitZappe, H.H.Zappe2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21684510.1109/JQE.2008.2001927A widely tunable (Delta lambda/lambda = 7%) micro-mechanical external cavity GaSb-based diode laser (mu ECL) emitting around 2.1 mu m is presented. A micro-machined grating with a rectangular grating profile, which can be tilted electrostatically, is employed as wavelength selective element within the external cavity using a Littrow configuration. An optimized grating profile leads to a high diffraction efficiency in the -1st diffraction order and therefore to a broad tuning range of 152 nm. The maximum output power of the fiber coupled mu ECL system varied only moderately between 22 and 10 mW across the tuning range.enexternal cavityexterner ResonatorGaSbinfrared diode laserInfrarot-Diodenlasertuning rangeDurchstimmbereichmicro-machine gratingMikrosystemtechnik667621journal article