Biehl, S.S.BiehlLüthje, H.H.LüthjeBandorf, R.R.BandorfSick, J.-H.J.-H.Sick2022-03-032022-03-032006https://publica.fraunhofer.de/handle/publica/21088510.1016/j.tsf.2006.07.1432-s2.0-33750443279Amorphous diamond-like carbon films are well known for their excellent tribological properties. In this paper, we will discuss the sensoric properties of multifunctional a-C:H films with respect to force/load/pressure and temperature measurement. It turned out that nanostructured amorphous carbon films showed an impressive piezoresistive effect. Unlike well known strain gages and piezoresistive sensors, which detect a deformation of the base substrate, this novel sensor can be used in a complete stiff arrangement without any elastic joint. For film preparation, rf-plasma CVD processes were used. Besides gas pressure, a variation of the substrate power and bias potential was performed. It turned out that the tribological parameters varied slightly (hardness: 20-30 GPa, friction coefficient: 0.10 to 0.15), whereas the electrical parameters showed remarkable differences with respect to the electrical resistivity and piezoresistivity. This paper will also present different applications of amorphous carbon thin film sensors.endiamond-like carbonpiezoresistivityload sensorsensor washerintelligent bearing667541journal article