Investigations on piezoelectric behaviour of aluminium nitride thin films for high frequency smart ultrasonic sensors systems

Herzog, T.T.HerzogWalter, S.S.WalterHeuer, H.H.Heuer2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/374968en620Investigations on piezoelectric behaviour of aluminium nitride thin films for high frequency smart ultrasonic sensors systemsconference paper