Nippgen, S.S.NippgenGillner, A.A.GillnerSmolenko, A.A.Smolenko2022-03-052022-03-052018https://publica.fraunhofer.de/handle/publica/25445410.1016/j.procir.2018.08.0372-s2.0-85057378733Working with ultrashort pulsed (USP) laser systems with high repetition rates > 100 kHz, heat accumulation effects evolve and subsequently the absorption becomes linear. As a consequence, the process dynamics change significantly. Structuring glasses with those USP Lasers leads to melted lines that are used for waveguides, welding or selective laser-induced etching whose resulting qualities are strongly depending of the structuring results and given smoothness. We perform simulations during in-volume modification processes, by recalculating the absorption behavior in between the iteration steps of heat accumulation. The simulation results provide explanations for smoothness or non-smoothness of modifications comparable to experiments in glass.en621journal article