Kinski, I.I.KinskiSchmidt, J.J.SchmidtMichaelis, A.A.MichaelisUhlig, S.S.Uhlig2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/227570en620666Plasma-enhanced chemical vapour deposition of ZnO for photovoltaic TCO applicationjournal article