Thickness dependence of electromechanical properties of PZT thin films on metallic substrates

Seifert, S.S.SeifertLöbmann, P.P.LöbmannSporn, D.D.SpornHauke, T.T.HaukeBeige, H.H.Beige2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333700en666Thickness dependence of electromechanical properties of PZT thin films on metallic substratesconference paper