Bräuer, G.G.Bräuer2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19756210.1002/1522-2454(200012)12:6<368::AID-VIPR368>3.0.CO;2-VVacuum coated glass plays an outstanding role for the energy saving of buildings. The basis of such low emissivity coatings is a 10 nm thick silver layer causing an effective reflexion of room temperature radiation. With conventional coatings k-values of 1,3 W/m²K are realized. In the frame of a research project funded by the BMBF reactive mid frequency sputtering (Leybold Twin-Mag) has been introduced for manufacturing of low e glass. The new developed system glass - TiO2 - ZnO - Ag - NiCrOx - Si3N4 enables a k-value of 1,1 W/m²K and an improvement of optical properties.de667533journal article