Löchel, B.B.LöchelMaciossek, A.A.MaciossekWagner, B.B.WagnerEngelmann, G.G.EngelmannQuenzer, H.J.H.J.Quenzer2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322753en621Magnetically driven microstructures fabricated with multilayer electroplatingconference paper