Novel Copper(I) and Silver(I) Complexes as Precursors for Chemical Vapor Deposition and Spin-Coating of Copper and Silver

Frühauf, S.S.FrühaufGessner, T.T.GessnerHaase, T.T.HaaseJakob, A.A.JakobKohse-Hoeinghaus, K.K.Kohse-HoeinghausLang, H.H.LangSchulz, S.E.S.E.SchulzWächtler, T.T.Wächtler2022-03-102022-03-102007https://publica.fraunhofer.de/handle/publica/357386enNovel Copper(I) and Silver(I) Complexes as Precursors for Chemical Vapor Deposition and Spin-Coating of Copper and Silverconference paper