Hartung, H.H.HartungKley, E.-B.E.-B.KleyTünnermann, A.A.TünnermannGischkat, G.G.GischkatSchrempel, F.F.SchrempelWesch, W.W.Wesch2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21667510.1364/OL.33.002320We present results on the fabrication and characterization of ridge waveguides in zinc-substituted lithium niobate. High-quality waveguides were fabricated by a combination of liquid-phase epitaxy and multiple applications of ion-beam enhanced etching. The two major demands on ridge waveguides, a very low side-wall roughness and a rectangle shape with side-wall angles close to 90°, were realized simultaneously by using this technique. Single-mode waveguiding at a wavelength of 1064 nm was demonstrated with attenuation values of 0.9 dB/cm.enLiNbO3generationcrystal620535journal article