Paskaleva, A.A.PaskalevaLemberger, M.M.LembergerBauer, A.J.A.J.Bauer2022-03-032022-03-032007https://publica.fraunhofer.de/handle/publica/21260510.1063/1.2420774en670620530621Stress induced leakage current mechanism in thin Hf-silicate layersjournal article