Trieu, H.-K.H.-K.TrieuKordas, N.N.KordasMokwa, W.W.Mokwa2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/34053310.1109/ICSENS.2002.10373362-s2.0-1542360851This paper describes the development and characterization of CMOS compatible surface micromachined capacitive differential pressure sensors with monolithic integrated electronics. Results from on-chip linearization, temperature compensation and investigation of humidity influence are presented.enprogrammierbarer Chipdifferential pressure sensorcapacitive sensoron-chip programmabilitytemperature compensationDifferenzdruckmessungTemperaturkompensationkapazitiver Drucksensor621Fully CMOS compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensationconference paper