Junghähnel, M.M.JunghähnelHeimke, B.B.HeimkeHartung, U.U.HartungKopte, T.T.KopteZywitzki, O.O.Zywitzki2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/366430entransparent conductive oxidetitanium dioxideniobium doped titaniasputtering620667670Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputteringconference paper