Beyerer, JürgenLi, ZhengZhengLi2022-08-262022-08-262022https://publica.fraunhofer.de/handle/publica/42002210.5445/KSP/1000145608Diffractive lens arrays are proposed in this work for application in reflected-light confocal microscopes. They have overcome the limitations between fields of view and resolution of traditional objectives. Experiments of multi-spot confocal imaging in surface metrology and fluorescence microscopy have been demonstrated based on the proposed concepts, which have shown capabilities of high-resolution measurement over a large area.endiffraktives optisches ElementKonfokalmikroskopieFluoreszenzmikroskopieMetrologie3D Messtechnikdiffractive optical elementconfocal microscopyfluorescence microscopymetrology3D measurement technologydoctoral thesis