Spin coating in UV depth lithography and 3D microfabrication

Engelmann, G.G.EngelmannDietrich, L.L.DietrichRenger, E.E.RengerGentzsch, S.S.GentzschReichl, H.H.Reichl2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/329084en621Spin coating in UV depth lithography and 3D microfabricationconference paper