Schultrich, BerndBerndSchultrich2022-03-052022-03-052018https://publica.fraunhofer.de/handle/publica/25491910.1007/978-3-662-55927-7_72-s2.0-85043776701The influence of the deposition conditions on the structure and the properties of the resulting amorphous carbon films is summarized in a number of reviews.en621671book article