Quay, RüdigerRüdigerQuayDammann, MichaelMichaelDammannKemmer, TobiasTobiasKemmerBrueckner, PeterPeterBruecknerCwiklinski, MaciejMaciejCwiklinskiSchwantuschke, DirkDirkSchwantuschkeKrause, SebastianSebastianKrauseLeone, StefanoStefanoLeoneMikulla, MichaelMichaelMikulla2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/40629810.1109/IEDM19573.2019.8993554This paper gives the state-of-the-art (SOA) of the technological development and the reliability status of deepsubmicron Gallium Nitride (GaN) high-electron mobility transistors (HEMTs) with gate lengths of 100 nm or below. Several process technologies are discussed and epitaxial, process options, and reliability are compared. Promising GaN MMIC device results are also provided leading to improved GaN G-band operation at frequencies near 200 GHz.en667conference paper