Schulz, UlrikeUlrikeSchulz2022-03-042022-03-042013https://publica.fraunhofer.de/handle/publica/23366710.1515/aot-2013-00492-s2.0-84942058090Transparent plastics have been used for optical applications with growing demand. This development is accompanied by a desire for extended surface functionalities. Most important optical surface function is antireflection (AR), which is performed mainly by applying plasma-assisted processes. Critical considerations for coating polymers include interaction with emission from plasma and thermal stress. State-of-the-art vacuum processes for coating on plastic, as well as new results of research and development in the fields of AR design and AR structures will be introduced and discussed.enantireflectionplasma coatingplasma-etched nanostructuresplastic opticsstressjournal article