Santos, R.R.SantosD'Agostino, D.D.D'AgostinoSoares, F.M.F.M.SoaresRabbani Haghighi, H.H.Rabbani HaghighiSmit, M.K.M.K.SmitLeijtens, X.J.M.X.J.M.Leijtens2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/389691This work describes the fabrication and characterization of a novel mirror that allows vertical coupling of optical signals to an InP waveguide. This structure was fabricated with a wet-etched process compatible with the COBRA active passive integration process. Implementing the vertical coupler enables on-wafer characterization of optical signals in an early stage of the fabrication process.enconference paper