Deposition of Al and Cu nanoparticles on silicon wafer using a picosecond Nd: YAG Laser. An experiment-based parameter optimization guide

Azhdast, M.H.M.H.AzhdastKossatz, M.M.KossatzEichler, H.J.H.J.EichlerLang, K.-D.K.-D.LangGlaw, V.V.Glaw2022-03-132022-03-132017https://publica.fraunhofer.de/handle/publica/39755110.1364/CLEO_AT.2017.JTu5A.122-s2.0-85020413424The optimization of parameters for laser deposition of nanoparticles on Si-wafer is studied. The threshold of laser energy, pulses per laser shot and overlapping is crucial in order to achieve the best deposition results.en621Deposition of Al and Cu nanoparticles on silicon wafer using a picosecond Nd: YAG Laser. An experiment-based parameter optimization guideconference paper