Pflug, A.A.PflugSzyszka, B.B.SzyszkaSittinger, V.V.SittingerNiemann, J.J.Niemann2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/343768enreactive depositionsputter depositionsputtering targetprocess simulation667Process simulation for advanced large area optical coatingsconference paper