Comparison of Novel Charge-Based Wafer Inspection Technique to Optical Defect Mapping Techniques

Under CopyrightKarhu, RobinRobinKarhuNguyen, SophiaSophiaNguyenAlbrecht, Kevin M.Kevin M.AlbrechtPolisski, GennadiGennadiPolisskiWilson, MarshallMarshallWilsonKallinger, BirgitBirgitKallinger2023-12-142023-12-142023-09https://publica.fraunhofer.de/handle/publica/458046https://doi.org/10.24406/publica-231710.24406/publica-2317enComparison of Novel Charge-Based Wafer Inspection Technique to Optical Defect Mapping Techniquesposter