Paeschke, M.M.PaeschkeBuchmann, L.M.L.M.BuchmannSeitz, R.R.SeitzHintsche, R.R.Hintsche2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326221en621Fabrication and investigation of nanometer sized dielectric interdigitated transducers for detection of biomolecular bindingconference paper