Gehler, J.J.GehlerBräuer, A.A.BräuerKarthe, W.W.Karthe2022-03-032022-03-031994https://publica.fraunhofer.de/handle/publica/18517810.1049/el:19940155A novel waveguide coupler consisting of two antiresonant reflecting optical waveguides in strip-configuration has been developed on Si-SiO2-SiON basis. Remote coupling over a distance of 93 mym has been demonstrated experimentally.ene-beamElektronenstrahllithographieintegrated opticintegrierte Optikremote couplerRichtkopplerRIEsiliconoxinitridSiliziumoxinitridStreifen-ARROWstrip-ARROW620384journal article